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Combined out-of-plane and in-plane texture control in thin films using ion beam assisted deposition

Published online by Cambridge University Press:  31 January 2011

L. Dong ,
D. J. Srolovitz ,
G. S. Was ,
Q. Zhao  and
A. D. Rollett
L. Dong
Affiliation:
Department of Materials Science and Engineering, The University of Michigan, Ann Arbor, Michigan 48109
D. J. Srolovitz
Affiliation:
Princeton Materials Institute and Department of Mechanical and Aerospace Engineering, Princeton University, Princeton, New Jersey 08544
G. S. Was
Affiliation:
Department of Materials Science and Engineering, and Department of Nuclear Engineering and Radiological Sciences, The University of Michigan, Ann Arbor, Michigan 48109
Q. Zhao
Affiliation:
Department of Nuclear Engineering and Radiological Sciences, The University of Michigan, Ann Arbor, Michigan 48109
A. D. Rollett
Affiliation:
Department of Materials Science and Engineering, Carnegie Mellon University, Pittsburgh, Pennsylvania 15213
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Abstract

Complete control of the texture of a film during growth requires the ability to determine the in-plane and out-of-plane texture simultaneously. We present both computer simulation and experimental evidence for the simultaneous establishment of out-of-plane and in-plane texture during ion beam assisted deposition of aluminum. Channeling along 〈110〉 directions (60° from the normal) creates a {220} out-of-plane orientation rather than the thermodynamically preferred {111} orientation. The ion beam also aligned 〈220〉 directions within the plane of the film. Measured x-ray pole figures confirmed the presence of a strong out-of-plane texture and the presence of two main, twin-related, in-plane texture components. We theoretically demonstrated that it is impossible to completely control both the in-plane and out-of-plane texture with a single ion beam in high-symmetry crystals and two ion beams must be employed to ensure complete texture control.

Type
Articles
Information
Journal of Materials Research , Volume 16 , Issue 1 , January 2001 , pp. 210 - 216
Copyright
Copyright © Materials Research Society 2001

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