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Compositional Tailored Sol-Gel SiO2–TiO2 Thin Films: Crystallization, Chemical Bonding Configuration, and Optical Properties

  • Li-Lan Yang (a1), Yi-Sheng Lai (a1), J.S. Chen (a1), P.H. Tsai (a2), C.L. Chen (a2) and C. Jason Chang (a2)
  • DOI:
  • Published online: 01 March 2011

Thin films of SiO2–TiO2 composite oxides with various SiO2:TiO2 compositions were prepared by the sol-gel method, using tetraethylorthosilicate (TEOS) and titanium tetraisopropoxide (TTIP) as precursors. The composition, crystal structure, and chemical bonding configuration of the as-deposited and annealed SiO2–TiO2 thin films were analyzed using Rutherford backscattering spectrometry (RBS), glancing incident angle x-ray diffraction (GIAXRD) and Fourier transform infrared spectroscopy (FTIR), respectively. Optical properties of the films were characterized by spectroscopic ellipsometry and ultraviolet-visible spectrophotometry. The Si/Ti ratios in the SiO2–TiO2 films agree with the TEOS/TTIP molar ratio in the sol-gel precursor. When the TEOS/(TEOS + TTIP) ratio is greater than 40%, the SiO2–TiO2 thin films remain amorphous (without formation of TiO2 crystalline phase) after annealing at temperatures as high as 700 °C. FTIR spectra indicate that the quantity of Si–O–Ti bonding can be maximized when the TEOS:TTIP in the precursor is 80%:20%. The refractive index of the SiO2–TiO2 films increases approximately linearly to the mixing ratio of TTIP/(TEOS + TTIP). However, SiO2-rich films possess higher ultraviolet-visible transmittance than the TiO2-rich films. The modification of microstructure and chemical bonding configuration in the SiO2–TiO2 films by the composition and its influence on the optical properties are discussed.

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1J. Vörös , J.J. Ramsden , G. Csúcs , I. Szendrő , S.M. De Paul , M. Textor and N.D. Spencer : Optical grating coupler biosensor. Biomaterials 23, 3699 (2002).

3C. Jamois , R.B. Wehrspohn , L.C. Andreani , C. Hermann , O. Hess and U. Gösele : Silicon-based two-dimensional photonic crystal waveguides. Photon. Nanostruct. 1, 13 (2003).

4X. Wang , H. Masumoto , Y. Someno and T. Hirai : Microstructure and optical properties of amorphous TiO2–SiO2 composite films synthesized by helicon plasma sputtering. Thin Solid Films 338, 105 (1999).

5R. Laird and A. Belkind : Cosputtered films of mixed TiO2/SiO2. J. Vac. Sci. Technol. A 10, 1908 (1992).

6J.S. Chen , S. Chao , J.S. Kao , H. Niu and C.H. Chen : Mixed films of TiO2–SiO2 deposited by double electron-beam coevaporation. Appl. Opt. 35, 90 (1996).

7L.S. Hsu , R. Rujkorakarn , J.R. Sites and C.Y. She : Thermally induced crystallization of amorphous-titania films. J. Appl. Phys. 59, 3475 (1986).

8S. Chao and W.H. Wang : Characteristics of ion-beam-sputtered high refractive index TiO2–SiO2 mixed films. J. Opt. Soc. Am. A 16, 1477 (1999).

9S. Asano and M. Sato : Light scattering by randomly oriented spheroidal particles. Appl. Opt. 19, 962 (1980).

10A. Selvarajan and T. Srinivas : Optical amplification and photosensitivity in sol-gel based waveguides. IEEE J. Quantum Electron. 37, 1117 (2001).

11X. Orignac and R.M. Almeida : Silica-based sol-gel optical waveguides on silicon. IEE Proc. Optoelectron. 143, 287 (1996).

12H.J. Lee , S.H. Hahn , E.J. Kim and Y.Z. You : Influence of calcinations temperature on structural and optical properties of TiO2–SiO2 thin films prepared by sol-gel dip coating. J. Mat. Sci. 39, 3683 (2004).

13Z. Jiwei , Y. Tao , Z. Liangying and Y. Xi : The optical waveguiding properties of TiO2–SiO2 composite films prepared by the sol-gel process. Ceram. Int. 25, 667 (1999).

14C.H. Kwon , J.H. Kim , I.S. Jung , H. Shin and K.H. Yoon : Preparation and characterization of TiO2–SiO2 nano-composite thin films. Ceram. Int. 29, 851 (2003).

15G.W. Wallidge , R. Anderson , G. Mountjoy , D.M. Pickup , P. Gunawidjaja , R.J. Newport and M.E. Smith : Advanced physical characterization of the structural evolution of amorphous (TiO2)x(SiO2)1−x sol-gel materials. J. Mater. Sci. 39, 6743 (2004).

17W.K. Chu , J.W. Mayer and M.A. Nicolet : Backscattering Spectrometry (Academic Press, New York, 1978), pp. 2137.

18A. Matsuda , Y. Matsuno , M. Tatsumisago and T. Minami : Changes in porosity and amounts of adsorbed water in sol-gel derived porous silica films with heat treatment. J. Sol-Gel Sci. Technol. 20, 129 (2001).

19T.J. Barton , L.M. Bull , W.G. Klemperer , D.A. Loy , B. McEnaney , M. Misono , P.A. Monson , G. Pez , G.W. Scherer , J.C. Vartuli and O.M. Yaghi : Tailored porous materials. Chem. Mater. 11, 2633 (1999).

20J. Yang , J.M.F. Ferreira , W. Weng and Y. Tang : Sol-gel preparation and electrorheological activity of SiO2–TiO2 composite powders. J. Colloid Interf. Sci. 195, 59 (1997).

22J.K. Walters , J.S. Rigden , P.J. Dirken , M.E. Smith , W.S. Howells and R.J. Newport : An atomic-scale study of the role of titanium in TiO2:SiO2 sol-gel materials. Chem. Phys. Lett. 264, 539 (1997).

23J.L. Whitten , Y. Zhang , M. Menon and G. Lucovsky : Electronic structure of SiO2: Charge redistribution contributions to the dynamic dipoles/effective charges of the infrared active normal modes. J. Vac. Sci. Technol. B 20, 1710 (2002).

24E.I. Kamitsos : Reply to comment on infrared-reflectance spectra of heat-treated, sol-gel-derived silica. Phys. Rev. B 53, 14659 (1996).

25C.F. Song , M.K. , P. Yang , D. Xu and D.R. Tuan : Structure and photoluminescence properties of sol-gel TiO2–SiO2 films. Thin Solid Films 413, 155 (2002).

26R.M. Almeida , T.A. Guiton and C.G. Pantano : Characterization of silica gels by infrared reflection spectroscopy. J. Non-Cryst. Solids 121, 193 (1990).

27Q. Fang , M. Meier , J.J. Yu , Z.M. Wang , J-Y. Zhang , J.X. Wu , A. Kenyon , P. Hoffmann and I.W. Boyd : FTIR and XPS investigation of Er-doped SiO2–TiO2 films. Mater. Sci. Eng. B 105, 209 (2003).

28A. Borghesi , B. Pivac , A. Sassella and A. Stella : Oxygen precipitation in silicon. J. Appl. Phys. 77, 4169 (1995).

29S. Larouche , H. Szymanowski , J.E. Klemberg-Sapieha , L. Martinu and S.C. Gujrathi : Microstructure of plasma-deposited SiO2/TiO2 optical films. J. Vac. Sci. Technol. A 22, 1200 (2004).

30J. Wang , W.S. Brocklesby , J.R. Lincoln , J.E. Townsend and D.N. Payne : Local structures of rare-earth ions in glasses: The crystal-chemistry approach. J. Non-Cryst. Solids 163, 261 (1993).

32X. Orignac , H.C. Vasconcelos and R.M. Almeida : Structural study of SiO2–TiO2 sol-gel films by x-ray absorption and photoemission spectroscopies. J. Non-Cryst. Solids 217, 155 (1997).

33D.L. Evans : Solid solution of TiO2 in SiO2. J. Am. Ceram. Soc. 53, 418 (1970).

34D.E. Aspnes : Optical properties of thin films. Thin Solid Films 89, 249 (1982).

35Md. Mosaddeq-ur-Rahman , G. Yu , T. Soga , T. Jimbo , H. Ebisu and M. Umeno : Refractive index and degree of inhomogeneity of nanocrystalline TiO2 thin films: Effects of substrate and annealing temperature. J. Appl. Phys. 88, 4634 (2000).

36M. Benatsou , B. Capoen , M. Bouazaoui , W. Tchana and J.P. Vilcot : Preparation and characterization of sol-gel derived Er3+: Al2O3–SiO2 planar waveguides. Appl. Phys. Lett. 71, 428 (1997).

37S. Chatterjee : Light scattering by a dielectric films with periodically varying refractive index profiles. Phys. Scr. 67, 234 (2003).

38T.A. Leskova , A.A. Maradudin and I.V. Novikov : Scattering of light from the random interface between two dielectric media with low contrast. J. Opt. Soc. Am. A 17, 1288 (2000).

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