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Contribution of substrate to converse piezoelectric response of constrained thin films

Published online by Cambridge University Press:  01 October 2004

Lang Chen ,
J-H. Li ,
J. Slutsker ,
J. Ouyang  and
A.L. Roytburd
Lang Chen
Affiliation:
Materials Research Science and Engineering Center, Department of Materials Science and Engineering, University of Maryland, College Park, Maryland 20742
J-H. Li
Affiliation:
Materials Research Science and Engineering Center, Department of Materials Science and Engineering, University of Maryland, College Park, Maryland 20742
J. Slutsker
Affiliation:
Materials Research Science and Engineering Center, Department of Materials Science and Engineering, University of Maryland, College Park, Maryland 20742
J. Ouyang
Affiliation:
Materials Research Science and Engineering Center, Department of Materials Science and Engineering, University of Maryland, College Park, Maryland 20742
A.L. Roytburd*
Affiliation:
Materials Research Science and Engineering Center, Department of Materials Science and Engineering, University of Maryland, College Park, Maryland 20742
*
a) Address all correspondence to this author. e-mail: roytburd@wam.umd.edu
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Abstract

The converse piezoelectric response of a thin film constrained by a substrate is analyzed in different geometries under various boundary conditions. We considerthe effects of elastic deformation of the substrate on the total displacement of thefilm surface induced by the electric field. The change of film thickness and the bending curvature of a film/substrate couple are calculated. For a thin film island clamped on a large thick substrate, the theoretical estimation of the piezoresponse, including a local bending in the vicinity of the island/substrate interface, is in agreement with the finite element calculation.

Keywords

PiezoelectricityThin filmTheory
Type
Articles
Information
Journal of Materials Research , Volume 19 , Issue 10 , October 2004 , pp. 2853 - 2858
Copyright
Copyright © Materials Research Society 2004

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References

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