Article contents
Crystalline perfection of chemical vapor deposited diamond films
Published online by Cambridge University Press: 31 January 2011
Abstract
The crystalline perfection of microwave plasma assisted chemical vapor deposited (MPACVD) diamond films grown under various conditions has been examined by TEM. Most CVD diamond films thus far reported contain a high density of defects, predominantly twins and stacking faults on {111} planes. We show that under appropriate growth conditions, these planar defects are eliminated from the center of the crystallites, and occur only at grain boundaries where the growing crystallites meet.
- Type
- Materials Communications
- Information
- Copyright
- Copyright © Materials Research Society 1990
References
1Busch, D. M., Properties of Diamond, edited by Field, J. E. (Academic Press, London, 1979), Chap. 19.Google Scholar
2Caveney, R. J., Properties of Diamond, edited by Field, J. E. (Academic Press, London, 1979), Chap. 20.Google Scholar
5Geis, M. W., Efremow, N. N., and Rathman, D. D., “Device Applications of Diamond”, Diamond and Diamond-like Materials Science and Engineering Study, edited by Johnson, G. H., Geis, M., and Badzian, A. (Materials Research Society, Pittsburgh, PA, 1988).Google Scholar
6Derjaguin, B. V., Spitsyn, B. V., Gorodetsky, A. E., Zakharov, A. P., Bouilov, L. I., and Aleksenko, A. E., J. Cryst. Growth 31, 44 (1975).CrossRefGoogle Scholar
7Derjaguin, B. V. and Fedoseev, B. V., Growth of Diamond and Graphite from the Gas Phase (Izd. Nauka, Moscow, 1977), Chap. 4.Google Scholar
8Nakazawa, H., Kanazawa, Y., Kamo, M., and Osumi, K., Thin Solid Films 151 (2), 199 (1987).CrossRefGoogle Scholar
10Kamo, M., Sato, Y., Matsumoto, S., and Setaka, N., J. Cryst. Growth 62, 642 (1985).CrossRefGoogle Scholar
11Kobashi, K., Hishimura, K., Kawate, Y., and Horiuchi, T., J. Vac. Sci. Technol. A 6 (3), 1816 (1988).CrossRefGoogle Scholar
14Wort, C. J. H., Lettington, A. H., Smith, C., and Hetherington, A. V., SPIE Conf. Proc. (Orlando, FL, 1989).Google Scholar
15Hetherington, A. V., Wort, C. J. H., and Augustus, P. D., Institute Physics Conf. Series No. 98, 391 EMAG/MICRO 1989, edited by Goodhew, P. J. and Elder, H. J. (Institute of Physics, Bristol, 1989).Google Scholar
19Spear, K. E. and Frenklach, M., Mechanistic Hypotheses on Diamond Growth from the Vapour, SDI Office/Innovative Science and Technology-Office of Naval Research Diamond Technology Initiative Symposium, Crystal City, VA (July 1988).Google Scholar
21Evans, T., Properties of Diamond, edited by Field, J. E. (Academic Press, London, 1979), Chap. 13.Google Scholar
- 56
- Cited by