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Extraordinary adhesion of a simple niobium metal-bonding structure

  • H.S. Chen (a1), D.D. Bacon (a1), H.H. Law (a1), G.W. Kammlott (a1) and T.C. Wu (a1)...
Abstract

Extraordinary adhesion of a Nb-based/Au-Sn metallization structure on a SiO2/Si substrate has been observed by a tensile pull test. The metallization bond fails mostly via fracture through either the Si substrate or epoxy adhesive. The intrinsic adhesion pull strength of the metallization scheme is concluded to be greater than 10 kpsi, and the adhesion exceeds the Si-Si cohesive strength. The Nb-Si and Nb-O bonds at the interface are thermodynamically stable.

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1Wada, O. and Ueda, O., in Advanced Metallizations in Microelectronics, edited by Katz, A., Murarka, S. P., and Appelbaum, A. (Mater. Res. Soc. Symp. Proc. 181, Pittsburgh, PA, 1990), p. 273.
2Bacon, D. D., Katz, A., Lee, C. H., Tai, K. L., and Wong, Y. M., U.S. Patent 51,234,153 (Aug. 1993).
3Chen, H.S., Bacon, D.D., Chen, C.H., Kammlott, G., Jeng, G.K., Werder, D.J., and Tai, K.L., Appl. Phys. Lett. 66, 2191 (1995).
4Werder, D.J., Chen, C.H., Chen, H.S., and Bacon, D.D., unpublished.
5Binary Alloy Phase Diagrams, edited by Massalski, T. B., Okamoto, H., Subramanian, P. R., and Kacprzak, L. (ASM INTERNATIONAL, Metals Park, OH, 1990).
6Handbook of Chemistry and Physics, 65th ed. (CRS Press, Boca Raton, FL, 1984).
7Selected Values of the Thermodynamic Properties of Binary Alloys, edited by Hultgren, R., Orr, R. L., Anderson, P. D., and Kelley, K. K. (John Wiley, New York, 1973).
8Miedema, A. R., Boom, R., and de Boer, F. R., in Crystal Structure and Chemical Bonding in Inorganic Chemistry, edited by Rooymans, C. J. M. and Rabenau, A. (North-Holland, Amsterdam, 1975).
9Samsonov, G. V. and Vinitskii, I. M., Handbook of Refractory Compounds (IFI/Plenum, New York, 1980).
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Journal of Materials Research
  • ISSN: 0884-2914
  • EISSN: 2044-5326
  • URL: /core/journals/journal-of-materials-research
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