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Formation, evolution, and degradation of nanostructured covalent thin films deposited by low-energy cluster beam deposition

Published online by Cambridge University Press:  01 July 2006

Luisa D'Urso ,
A. Alessandro Scalisi ,
Corinna Altamore  and
Giuseppe Compagnini
Luisa D'Urso
Affiliation:
Dipartimento di Scienze Chimiche, Università di Catania, Catania 95125 Italy
A. Alessandro Scalisi
Affiliation:
Dipartimento di Scienze Chimiche, Università di Catania, Catania 95125 Italy
Corinna Altamore
Affiliation:
Dipartimento di Scienze Chimiche, Università di Catania, Catania 95125 Italy
Giuseppe Compagnini*
Affiliation:
Dipartimento di Scienze Chimiche, Università di Catania, Catania 95125 Italy
*
a) Address all correspondence to this author. e-mail: gcompagnini@unict.it This paper was selected as the Outstanding Meeting Paper for the 2005 MRS Fall Meeting Symposium Q Proceedings, Vol. 887.
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Abstract

Low-energy cluster beam deposition (LECBD) is considered an intriguing technique for obtaining thin layers with well-defined structures at the nano- and mesoscale levels, allowing novel optical, electronic, and magnetic properties. The produced layers are highly porous and extremely reactive due to the high surface to volume ratio and must be characterized with in situ techniques to study their original composition and their evolution once exposed to reactive gases. In this work, we present a general overview and some results on the formation, evolution, and deposition of silicon and carbon cluster beams produced using a laser vaporization source.

Keywords

Cluster assemblyFilmNanostructure
Type
Outstanding Meeting Papers
Information
Journal of Materials Research , Volume 21 , Issue 7 , July 2006 , pp. 1638 - 1644
Copyright
Copyright © Materials Research Society 2006

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