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Gas-phase coating of TiO2 with SiO2 in a continuous flow hot-wall aerosol reactor

  • Quint H. Powell (a1), George P. Fotou (a1), Toivo T. Kodas (a1), Bruce M. Anderson (a2) and Yongxiang Guo (a3)
  • DOI: http://dx.doi.org/10.1557/JMR.1997.0079
  • Published online: 01 January 2011
Abstract

The feasibility of in situ coating of titania particles with silica using a high-temperature, gas-phase process was demonstrated. Titania was produced from the reaction of TiCl4 and O2 in a hot-wall, tubular, aerosol reactor and directly coated in the gas phase via the reaction of O2 with SiCl4 vapor. Rough SiO2 coatings were obtained at 1300 °C while uniform, dense coatings were obtained at all conditions examined for 1500 °C. The presence of water in the reactor significantly influenced the morphology of the coatings and resulted in smooth, dense, and uniform coatings at 1300 °C. Coating thicknesses could be controlled from 5 nm to roughly 100 nm, corresponding to growth rates on the order of 10–100 nmys. The characteristics of the coatings depended upon the concentration of SiCl4 and the coating temperature. These process variables influenced the coating mechanism, growth rate, and densification which directly influenced the coating uniformity and thickness.

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Journal of Materials Research
  • ISSN: 0884-2914
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