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    Leonard, Benjamin D. Sadeghi, Farshid Evans, Ryan D. Doll, Gary L. and Shiller, Paul J. 2009. Fretting of WC/a-C:H and Cr2N Coatings Under Grease-Lubricated and Unlubricated Conditions. Tribology Transactions, Vol. 53, Issue. 1, p. 145.

    Evans, R.D. Doll, G.L. Meng, W.J. Mei, F. and Glass, J.T. 2007. Effects of applied substrate bias during reactive sputter deposition of nanocomposite tantalum carbide/amorphous hydrocarbon thin films. Thin Solid Films, Vol. 515, Issue. 13, p. 5403.


Mechanical property development in reactively sputtered tantalum carbide/amorphous hydrocarbon thin films

  • Ryan D. Evans (a1), Gary L. Doll (a2) and Jeffrey T. Glass (a3)
  • DOI:
  • Published online: 01 June 2006

Hardness, elastic modulus, and stress directly influence the ability of tantalum carbide/amorphous hydrocarbon (TaC/a-C:H) thin films to enhance the wear-resistance of steel tribological component surfaces. Designed factorial experiments enabled an evaluation of the effects of acetylene flow rate (QC2H2), direct current bias voltage level (Vb), and substrate rotation rate (ωRot) during deposition on the mechanical properties of reactively sputtered TaC/a-C:H films. Significant relationships were found between compressive stress level and Vb, whereas hardness and elastic modulus were dependent primarily on Vb and secondarily on QC2H2 within the studied parameter space. It is proposed that effects of ion bombardment on the a-C:H phase during growth are responsible for property dependencies on Vb. Decreases in hardness and elastic modulus with increasing QC2H2 are attributed to increased hydrogen concentration and a concomitant decreased volume fraction of TaC crystallites in the films.

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