Skip to main content
×
Home
    • Aa
    • Aa

Microinstruments for submicron material studies

  • M. T. A. Saif (a1) and N. C. MacDonald (a1)
Abstract

We present two microinstruments for submicron scale material characterization. One of the instruments applies torsion on two single crystal silicon bars with square cross sections,1 and 2.25 μm2, until fracture. The maximum shear stress prior to fracture is found tobe 5.6 and 2.6 GPa, respectively. The second instrument applies tension on a composite (aluminum-silicon dioxide) beam, 1 × 1.5 μm2 in cross section. The beam fails at 220 μN.In both the experiments, the samples are designed, patterned, and cofabricated with the instruments. The microinstruments' small size, low thermal mass, vacuum compatibility, and built-in vibration isolation allow material characterization to be performed over a wide range of environmental conditions: high vacuum (electron microscopy and surface analysis), high humidity, high pressure, and high and low temperatures.

Copyright
References
Hide All
1. W. C. Tang , T. H. Nguyen , and R. T. Howe , Sensors and Actuators 20, 2532 (1989); Technical Papers, San Francisco, California, 1991, pp. 205–208.

2. Z. L. Zhang and N. C. MacDonald , J-MEMS 2 (2), 6672 (1993).

3. K. A. Shaw , Z. L. Zhang , and N. C. MacDonald , Sensors and Actuators A 40, 6370 (1994).

4. M. T. A. Saif and N. C. MacDonald , Rev. Sci. Instrum. 69 (3), 14101422 (1998).

Recommend this journal

Email your librarian or administrator to recommend adding this journal to your organisation's collection.

Journal of Materials Research
  • ISSN: 0884-2914
  • EISSN: 2044-5326
  • URL: /core/journals/journal-of-materials-research
Please enter your name
Please enter a valid email address
Who would you like to send this to? *
×

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 4 *
Loading metrics...

Abstract views

Total abstract views: 38 *
Loading metrics...

* Views captured on Cambridge Core between September 2016 - 17th October 2017. This data will be updated every 24 hours.