Skip to main content

Nanostructure and mechanical properties of WC–SiC thin films

  • Jose L. Endrino (a1) and James E. Krzanowski (a1)

The mechanical properties of WC–SiC thin films deposited by dual radio frequency magnetron sputtering were investigated. The films were characterized by x-ray photoelectron spectroscopy, x-ray diffraction (XRD), and transmission electron microscopy (TEM) to evaluate the details of the microstructure and degree of amorphization. The results indicate that small additions of SiC (<25%) can significantly increase hardness compared to a pure WC film, but higher SiC contents do not strongly affect hardness. XRD studies show the SiC had a disordering effect. TEM results showed that WC films had coarse porous structure, but films with a low silicon carbide content (approximately 10 to 25 at%) had a denser nanocrystalline structure. Samples with greater than 25% SiC were amorphous. The initial hardness increase at lower SiC contents correlated well with the observed densification, but the transition to an amorphous structure did not strongly affect hardness.

Hide All
1.Veprek, S., Niederhofer, A., Moto, K., Bolom, T., Mannling, H.D., Nesladek, P., Dollinger, G., and Bergmaier, A., Surf. Coat. Technol. 133–134, 152 (2000).
2.Voevodin, A.A. and Zabinski, J.S., J. Mater. Sci. 33, 319 (1998).
3.Veprek, S., Reiprich, S., and Shizhi, Li, Appl. Phys. Lett. 66, 2640 (1995).
4.Veprek, S., Haussmann, M., and Reiprich, S., J. Vac. Sci. Technol. A 14, 46 (1996).
5.Christiansen, S., Albrecht, M., Strunk, H.P., and Veprek, S., J. Vac. Sci. Technol. B 16, 19 (1998).
6.Rebouta, L., Tavares, C.J., Aimo, R., Wang, Z., Pischow, K., Alves, E., Rojas, T.C., and Odriozola, J.A., Surf. Coat. Technol. 133–134, 234 (2000).
7.Vaz, F., Rebouta, L., Goudeau, P., Pacaud, J., Garem, H., Riviere, J.P., Cavaleiro, A., and Alves, E., Surf. Coat. Technol. 133–134, 307 (2000).
8.Meng, W.J., Tittsworth, R.C., and Rehn, L.E., Thin Solid Films 377–378, 222 (2000).
9.Zehnder, T. and Patscheider, J., Surf. Coat. Technol. 133–134, 138 (2000).
10.Krzanowski, J.E. and Koutzaki, S.H., J. Am. Ceram. Soc. 84, 672 (2001).
11.Koutzaki, S.H., Krzanowski, J.E., and Nainaparampil, J., J. Vac. Sci. Technol. A 19, 1912 (2001).
12.Phani, A.R., Krzanowski, J.E., and Nainaparampil, J.J., J. Vac. Sci. Technol. A 19, 2252 (2001).
13.Oliver, W.C. and Pharr, G.M., J. Mater. Res. 7, 1564 (1992).
14.Ohring, M., The Materials Science of Thin Films (Academic Press, San Diego, CA, 1992), p. 552.
15.Koutzaki, S.H., Krzanowski, J.E., and Nainaparampil, J.J., Met. Mater. Trans. 33A, 1579 (2002).
16.Voevodin, A.A., O'Neill, J.P., Prasad, S.V., and Zabinski, J.S., J. Vac. Sci. Technol. A 17, 986 (1999).
17.Bull, S.J. and Rickerby, D.S., in Mechanics of Coatings, edited by Dowson, D., Taylor, C.M., and Godet, M. (Institut National des Sciences Appliques, Lyon, France, 1989), pp. 337349.
18.Messier, R., Giri, A.P., and Roy, R.A., J. Vac. Sci. Technol. A 2, 500 (1984).
19.Veprek, S. and Reiprich, S., Thin Solid Films 268, 64 (1995).
20.Veprek, S., J. Vac. Sci. Technol. A 17, 2401 (1999).
Recommend this journal

Email your librarian or administrator to recommend adding this journal to your organisation's collection.

Journal of Materials Research
  • ISSN: 0884-2914
  • EISSN: 2044-5326
  • URL: /core/journals/journal-of-materials-research
Please enter your name
Please enter a valid email address
Who would you like to send this to? *


Altmetric attention score

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed