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Sol-gel Processing and Characterization of Alkaline Earth and Rare-earth Fluoride Thin Films

Published online by Cambridge University Press:  31 January 2011

Munehiro Tada ,
Shinobu Fujihara  and
Toshio Kimura
Munehiro Tada
Affiliation:
Department of Applied Chemistry, Faculty of Science and Technology, Keio University, 3–14–1, Hiyoshi, Kohoku-ku, Yokohama 223–8522, Japan
Shinobu Fujihara*
Affiliation:
Department of Applied Chemistry, Faculty of Science and Technology, Keio University, 3–14–1, Hiyoshi, Kohoku-ku, Yokohama 223–8522, Japan
Toshio Kimura
Affiliation:
Department of Applied Chemistry, Faculty of Science and Technology, Keio University, 3–14–1, Hiyoshi, Kohoku-ku, Yokohama 223–8522, Japan
*
a)Address all correspondence to this author.
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Abstract

Alkaline earth and rare-earth fluoride thin films were prepared on silica glass substrates by a sol-gel process using trifluoroacetic acid (TFA) as a fluorine source. Homogeneous solutions were obtained by stirring a mixture of alkaline earth or rare-earth metal acetates, TFA and H2O, dissolved in isopropanol. The solutions were spin-coated and heated at 300–800 °C. The fluoride thin films were obtained by heat treatment around 400 °C in air. The crystallization behavior, the surface morphology, and the optical properties of the films depended on the heating temperature as well as the chemical species of the metal ions.

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Type
Articles
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Journal of Materials Research , Volume 14 , Issue 4 , April 1999 , pp. 1610 - 1616
Copyright
Copyright © Materials Research Society 1999

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