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Synthesis and characterization of TiO2 thin films on organic self-assembled monolayers: Part I. Film formation from aqueous solutions

Published online by Cambridge University Press:  03 March 2011

H. Shin ,
R.J. Collins ,
M.R. De Guire ,
A.H. Heuer  and
C.N. Sukenik
H. Shin
Affiliation:
Department of Materials Science and Engineering. Case Western Reserve University, Cleveland, Ohio 44106
R.J. Collins
Affiliation:
Department of Chemistry, Case Western Reserve University, Cleveland, Ohio 44106
A.H. Heuer
Affiliation:
Department of Materials Science and Engineering, Case Western Reserve University, Cleveland, Ohio 44106
C.N. Sukenik
Affiliation:
Department of Chemistry, Case Western Reserve University, Cleveland, Ohio 44106
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Abstract

Self-assembled monolayers (SAMs) bearing sulfonate (-SO3H) surface functional groups, on single-crystal Si wafers, were used as substrates for the deposition of TiO2 thin films from aqueous solutions. Polycrystalline TiO2 thin films over 50 nm thick formed in 2 h by hydrolysis of TiCl4 in aqueous HCI solutions at 80 °C. The films were pore-free, showed excellent adherence and uniformity, and consisted of anatase crystallites 2–4 nm in diameter. Annealing at temperatures up to 600 °C caused coarsening of the anatase grains, but no loss of adherence or structural integrity.

Type
Articles
Information
Journal of Materials Research , Volume 10 , Issue 3 , March 1995 , pp. 692 - 698
Copyright
Copyright © Materials Research Society 1995

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