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Thin-film synthesis of the high-Tc oxide superconductor YBa2Cu3O7 by electron-beam codeposition

Published online by Cambridge University Press:  31 January 2011

M. Naito ,
R. H. Hammond ,
B. Oh ,
M. R. Hahn ,
J. W. P. Hsu ,
P. Rosenthal ,
A. F. Marshall ,
M. R. Beasley ,
T. H. Geballe  and
A. Kapitulnik
M. Naito
Affiliation:
Department of Applied Physics, Stanford University, Stanford, California 94305
R. H. Hammond
Affiliation:
Department of Applied Physics, Stanford University, Stanford, California 94305
B. Oh
Affiliation:
Department of Applied Physics, Stanford University, Stanford, California 94305
M. R. Hahn
Affiliation:
Department of Applied Physics, Stanford University, Stanford, California 94305
J. W. P. Hsu
Affiliation:
Department of Applied Physics, Stanford University, Stanford, California 94305
P. Rosenthal
Affiliation:
Department of Applied Physics, Stanford University, Stanford, California 94305
A. F. Marshall
Affiliation:
Department of Applied Physics, Stanford University, Stanford, California 94305
M. R. Beasley
Affiliation:
Department of Applied Physics, Stanford University, Stanford, California 94305
T. H. Geballe
Affiliation:
Department of Applied Physics, Stanford University, Stanford, California 94305
A. Kapitulnik
Affiliation:
Department of Applied Physics, Stanford University, Stanford, California 94305
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Abstract

The successful synthesis of high-Tc YBa2Cu3O7 films by means of electron-beam codeposition are reported. Several important growth parameters have been surveyed in a preliminary way. The substrates investigated include Al2O3, ZrO2, MgO, and SrTiO3, The films were characterized by resistivity measurements, x-ray diffraction, microprobe, and Rutherford backscattering analysis. Some TEM and critical current density studies were also carried out. The best results to date have been obtained on SrTiO3 substrates with which polycrystalline epitaxial growth has been achieved. Resistive superconducting transitions with zero resistance at 89.5 K and a 2 K width have been observed in these films.

Type
Articles
Information
Journal of Materials Research , Volume 2 , Issue 6 , December 1987 , pp. 713 - 725
Copyright
Copyright © Materials Research Society 1987

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References

REFERENCES

1Bednorz, J. and Miiller, A. K., Z. Phys. B 64, 189 (1986).CrossRefGoogle Scholar
2Uchida, S., Takagi, H., Kitazawa, K., and Tanaka, S., Jpn. J. Appl. Phys. 26, LI (1987); H. Takagi, S. Uchida, K. Kitazawa, and S. Tanaka, Jpn. J. Appl. Phys. 26, L123 (1987).Google Scholar
3Wu, M. K., Ashburn, J. R., Torng, C. J., Hor, P. H., Meng, R. L., Gao, L., Huang, Z. J., Wang, Y. Q., and Chu, C. W., Phys. Rev. Lett. 58, 908 (1987).Google Scholar
4Cava, R. J., Batlogg, B., Dover, R. B. van, Murphy, D. W., Sunshine, S., Siegrist, T., Remeika, J. P., Rietman, E. A., Zahurak, S., and Espinosa, G. P., Phys. Rev. Lett. 58, 1676 (1987).CrossRefGoogle Scholar
5Laibowitz, R. B., Koch, R. H., Chaudhari, P., and Gambino, R. J., Phys. Rev. B 35, 882 (1987); P. Chaudhari, R. H. Koch, R. B. Laibowitz, T. R. McGuire, and R. J. Gambino, Phys. Rev. Lett. 58, 2684 (1987).Google Scholar
6Hinks, D. G., Soderholm, L., Capone, D. W. II, Jorgensen, J. D., Schuller, I. K., Segre, C. U., Zhang, K., and Grace, J. D., submitted to Appl. Phys. Lett.; S.-J. Hwu, S. N. Song, J. B. Ketterson, T. O. Mason, and K. R. Poeppelmeier, submitted to Commun. Am. Ceramic Soc.Google Scholar
7Hammond, R. H., IEEE Trans. Mag. 11, 201 (1975); J. Vac. Sci. Technol. 15, 382(1978).CrossRefGoogle Scholar
8The Cu2O, CuO appeared to decompose to Cu and O2 during evaporation, and BaO is extremely hydroscopic.Google Scholar
9Oh, B., Naito, M., Arnason, S., Rosenthal, P., Beasley, M. R., Geballe, T. H., Hammond, R. H., and Kapitulnik, A., Appl. Phys. Lett. 51, 852 (1987).CrossRefGoogle Scholar
10Hammond, R. H., Naito, M., Oh, B., Hahn, M., Rosenthal, P., Marshal, A., Missert, N., Beasley, M. R., Kapitulnik, A., and Ge-balle, T. H., in the Extended Abstracts for the Materials Research Society Symposium on High-Temperature Superconductors, Anaheim, California, 23, 24 April 1987, p. 169.Google Scholar
11The deposition conditions and microprobe compositions of all the films in this paper are shown in the figure caption in the following way: Film No. [substrate temperature Ts, Y source (Y or Y2O3), microprobe composition (Y:Ba:Cu by percentage)].Google Scholar
12The apparent interdiffusion seen by RBS in this paper needs to be confirmed by other more thorough analyses. This could include RBS simulation studies, Auger profiles, and SIMS profiles.Google Scholar
13The ZrO2 was deposited from a Zr metal source in the presence of an oxygen ion flux (0.3 mA/cm2 and 150 V) from an ion gun while the substrates were kept at ambient temperature to avoid columnar growth that would result in a rough surface.Google Scholar
l4Former “Low-Temperature Group.”Google Scholar