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Transmission electron microscopy study of the structure of radio frequency sputter-deposited yttria-stabilized zirconia thin films

Published online by Cambridge University Press:  31 January 2011

David E. Ruddell ,
Brian R. Stoner  and
Jeffrey Y. Thompson
David E. Ruddell
Affiliation:
Curriculum in Applied and Materials Sciences, University of North Carolina at Chapel Hill, Chapel Hill, North Carolina 27599
Brian R. Stoner
Affiliation:
Curriculum in Applied and Materials Sciences, University of North Carolina at Chapel Hill, Chapel Hill, North Carolina 2759, and Materials and Electronic Technologies Division, MCNC, Research Triangle Park (RTP), North Carolina 27709
Jeffrey Y. Thompson*
Affiliation:
Curriculum in Applied and Materials Sciences, University of North Carolina at Chapel Hill, Chapel Hill, North Carolina 27599, and Department of Operative Dentistry, University of North Carolina at Chapel Hill, Chapel Hill, North Carolina 27599
*
a) Address all correspondence to this author. e-mail: jeff_thompson@dentistry.unc.edu
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Abstract

Transmission electron microscopy (TEM) was used to investigate the structural properties of sputter-deposited yttria-stabilized zirconia (YSZ) thin films. YSZ films were deposited over a range of temperatures and background oxygen levels. Additionally, a multilayered structure was produced by cyclic application of a substrate bias. Plan-view TEM showed that temperature and oxygen levels did not have a significant effect on grain size but did alter the phases present in the thin films. Cross-sectional TEM showed the development of texture in the multilayer film, both within the individual layers and in the entire film.

Type
Articles
Information
Journal of Materials Research , Volume 18 , Issue 1 , January 2003 , pp. 195 - 200
Copyright
Copyright © Materials Research Society 2003

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