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Design and Simulation Analysis of A Z Axis Microactuator with Low Mode Cross-Talk

Published online by Cambridge University Press:  14 October 2020

Dang Van Hieu ,
Le Van Tam ,
Nguyen Van Duong ,
Nguyen Duy Vy  and
Chu Manh Hoang Open the ORCID record for Chu Manh Hoang [Opens in a new window]
Dang Van Hieu
Affiliation:
International Training Institute for Materials Science, Hanoi University of Science and Technology, Hanoi, Viet Nam FPT University, Hoa Lac High Tech Park, Hanoi, Viet Nam
Le Van Tam
Affiliation:
International Training Institute for Materials Science, Hanoi University of Science and Technology, Hanoi, Viet Nam
Nguyen Van Duong
Affiliation:
International Training Institute for Materials Science, Hanoi University of Science and Technology, Hanoi, Viet Nam Faculty of Technical Education, Hanoi National University of Education, Cau Giay, Hanoi, Viet Nam
Nguyen Duy Vy
Affiliation:
Laboratory of Applied Physics, Advanced Institute of Materials Science, Ton Duc Thang University, Ho Chi Minh City 756636, Viet Nam Faculty of Applied Sciences, Ton Duc Thang University, Ho Chi Minh City 756636, Viet Nam
Chu Manh Hoang*
Affiliation:
International Training Institute for Materials Science, Hanoi University of Science and Technology, Hanoi, Viet Nam
*
*Corresponding author (hoangcm@itims.edu.vn, hoang.chumanh@hust.edu.vn)
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Abstract

For a vibration system, the best designed spring is compliant to a desired vibration mode while it is robust to other undesired modes. There are several types of spring design for displacing the proofmass along the x and y axes, however, very few designs of spring compliant to the z axis are introduced. Therefore, we propose a z axis microactuator in which the suspending spring is designed so that it is only compliant to vibration along the z axis. The suspending spring consists of straight beam stages mechanically coupled with each other via frames which are symmetrically designed around a center plate. The operation characteristics of the microactuator is investigated by theoretical expresses and numerical simulation. The frequency split between the z axis mode and undesired modes can obtain more than 45%. The operation frequency can be modified in a wide range, from 68 kHz to 400 kHz, by changing the dimensional parameters of spring beams. The spring beams can be lengthened to increase displacement in the z axis while the mode cross-talk is still suppressed. Compared to the previously reported researches, the current microactuator shows robustness to undesired vibration modes, which is potential for integration in low mode cross-talk multi-axis micro-stages and low-noise mechanical sensors.

Keywords

Coupled mechanical springz axis microactuatorlow mode cross-talk
Type
Research Article
Information
Journal of Mechanics , Volume 36 , Issue 6 , December 2020 , pp. 881 - 888
Copyright
Copyright © 2020 The Society of Theoretical and Applied Mechanics

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