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A Novel Method for Determining Poisson's Ratio of Thin Film Materials Using Ultra-Wide Micromachined Bilayer Cantilevers

Published online by Cambridge University Press:  05 May 2011

Max Ti-Kuang Hou  and
Rongshun Chen
Max Ti-Kuang Hou*
Affiliation:
Department of Mechanical Engineering, China Institute of Technology, Taipei, Taiwan 11581, R.O.C.
Rongshun Chen*
Affiliation:
Department of Power Mechanical Engineering, National Tsing Hua University, Hsinchu, Taiwan 30013, R.O.C.
*
*Assistant Professor
**Professor
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Abstract

Narrow micromachined bilayer cantilevers, which are broadly used to determine different thin film material properties, have rarely been used to characterize the Poisson's ratio. It is difficult to be determined from the tip deflection, and thus the Poisson's ratio, of the narrow bilayer cantilever. In this paper, the tip deflections of ultra-wide micromachined bilayer cantilevers carry the needed information for finding the Poisson's ratio of thin-film materials. The measurement process and its corresponding model, based on the plate theory, is introduced and tested. The Poisson's ratio of the thin film is determined by comparing the tip deflections of the bilayer cantilever before and after the deposition of the upper layer. Because the fabrication processes are widely used in surface micromachining, the method can be easily implemented.

Keywords

Poisson's ratioThin film materialsUltra-wide micromachined bilayer cantilever
Type
Articles
Information
Journal of Mechanics , Volume 20 , Issue 2 , June 2004 , pp. 107 - 112
Copyright
Copyright © The Society of Theoretical and Applied Mechanics, R.O.C. 2004

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