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The possibility for a voltage measurement technique using paraelectric behavior of capacitively coupled plasmas

Published online by Cambridge University Press:  10 December 2012

K. T. A. L. BURM
K. T. A. L. BURM*
Affiliation:
PlasmAIX for Plasma Research, Heimerik 47, 2440 Geel, Belgium (Karel.Burm@gmx.net)
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Abstract

An argon plasma is created from a general capacitively coupled plasma source and monitored by optical emission spectroscopy. A relation between the line intensity and the applied voltage is obtained and discussed. The plasma shows paraelectric behavior. A linear relation exists between the electric capacity of the capacitively coupled plasma and the applied voltage. This linear relation can be used in a new voltage measurement technique in which the applied voltage can be calculated from the measured line intensity.

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Type
Papers
Information
Journal of Plasma Physics , Volume 79 , Issue 5 , October 2013 , pp. 467 - 472
Copyright
Copyright © Cambridge University Press 2012 

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