Hostname: page-component-54dcc4c588-mz6gc Total loading time: 0 Render date: 2025-10-04T12:27:47.225Z Has data issue: false hasContentIssue false
  • English
  • Français

Characterization of Thin Films using Micromechanical Structures

Published online by Cambridge University Press:  15 February 2011

R. I. Pratt ,
G. C. Johnson ,
R. T. Howe  and
D. J. Nikkel Jr.
R. I. Pratt
Affiliation:
Berkeley Sensor & Actuator Center, University of California, Berkeley, CA 94720 Department of Mechanical Engineering, University of California, Berkeley, CA 94720
G. C. Johnson
Affiliation:
Berkeley Sensor & Actuator Center, University of California, Berkeley, CA 94720 Department of Mechanical Engineering, University of California, Berkeley, CA 94720
R. T. Howe
Affiliation:
Berkeley Sensor & Actuator Center, University of California, Berkeley, CA 94720 Department of Electrical Engineering and Computer Sciences, University of California, Berkeley, CA 94720
D. J. Nikkel Jr.
Affiliation:
Lawrence Livermore National Laboratory, Livermore, CA 94550
Get access

Abstract

Micromechanical structures designed for material characterization through analysis of their nonlinear dynamic response are presented. The structures consist of a rigid movable mass supported by beams which are attached to the wafer substrate. The structures are designed so that they are geometrically constrained, which is the source of their nonlinearity. The nonlinearity is shown to be well modeled by Duffing's equation for a stiffening spring and it is this model which is used to fit the test data to the desired mechanical properties, namely Young's modulus, intrinsic stress and damping.

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

Article purchase

Temporarily unavailable

References

REFERENCES

[1] Senturia, S. D., Proceedings, 4 th Intl. Conf. on Solid-State Sensors and Actuators (Transducers '87), June 1987, pp. 11–16Google Scholar
[2] Guckel, H., Randazzo, T. and Bums, D. W., J. Appl. Phys., 57, pp. 1671–1675, March 1985.Google Scholar
[3] Pratt, R. I., Johnson, G. C., Howe, R. T. and Chang, J. C., Proceedings, 6th Intl. Conf. on Solid-State Sensors and Actuators (Transducers '91), pp. 205–208, June 1991.Google Scholar
[4] Tang, W. C., PhD thesis, University of California at Berkeley, October 1990.Google Scholar
[5] Tang, W. C., Nguyen, T. C. H., Judy, M. W. and Howe, R. T., Sensors and Actuators, A21–A23, pp. 328–331, February 1990.Google Scholar
[6] Nayfeh, A. H. and Mook, D. T., Nonlinear Oscillations, Wiley, New York, 1979.Google Scholar
[7] Mullen, R. L., Mehregany, M., Omar, M. P. and Ko, W. H., Proceedings, IEEE Micro Electro Mechanical Systems Workshop, pp. 154–159, January 1991.Google Scholar