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Influence of Firing Gas Pressure on the Microstructure and Thermal Conductivity of ALN Ceramics

Published online by Cambridge University Press:  21 February 2011

M. Tsukada ,
H. Makihara ,
N. Kamehara  and
K. Niwa
M. Tsukada
Affiliation:
FUJITSU LABORATORIES LTD., 10-1 Morinosato-Wakamiya, Atsugi, Kanagawa, 243-01, Japan
H. Makihara
Affiliation:
FUJITSU LABORATORIES LTD., 10-1 Morinosato-Wakamiya, Atsugi, Kanagawa, 243-01, Japan
N. Kamehara
Affiliation:
FUJITSU LABORATORIES LTD., 10-1 Morinosato-Wakamiya, Atsugi, Kanagawa, 243-01, Japan
K. Niwa
Affiliation:
FUJITSU LABORATORIES LTD., 10-1 Morinosato-Wakamiya, Atsugi, Kanagawa, 243-01, Japan
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Abstract

The thermal conductivity of aluminum nitride is significantly affected by its purity. We used CaCO3 as an additive to decrease the oxygen content. Calcium-aluminate is formed by the reaction of the aluminum nitride powder oxide layers and CaO during firing. We investigated the influence of firing gas pressure on the microstructure and thermal conductivity of aluminum nitride. The thermal conductivity reached 270 W/m°K when 4 wt% CaO was added and firing gas pressure was 700 kPa. Under these conditions, the amount of remaining oxygen was at its minimum and the grain size of the aluminum nitride was at its maximum.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 167: Symposium K – Advanced Electronic Packaging Materials , 1989 , 247
Copyright
Copyright © Materials Research Society 1990

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