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A comparative microtribological investigation of diamond-like carbon films for applications in microsystems

Published online by Cambridge University Press:  11 February 2011

S. Imad-Uddin Ahmed ,
Giuseppe Bregliozzi  and
Henry Haefke
S. Imad-Uddin Ahmed
Affiliation:
CSEM Swiss Center for Electronics and Microtechnology Inc., Rue Jaquet Droz 1, CH-2007 Neuchâtel, Switzerland
Giuseppe Bregliozzi
Affiliation:
CSEM Swiss Center for Electronics and Microtechnology Inc., Rue Jaquet Droz 1, CH-2007 Neuchâtel, Switzerland
Henry Haefke
Affiliation:
CSEM Swiss Center for Electronics and Microtechnology Inc., Rue Jaquet Droz 1, CH-2007 Neuchâtel, Switzerland
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Abstract

This study reports on the microfrictional properties under reciprocating sliding of different types of commercially available diamond-like carbon (DLC) films, prepared using low and high frequency plasma-assisted chemical vapor deposition (PACVD) and the vacuum arc method. Silicon and sapphire balls were used as counterbodies. Friction-load curves suggest that, for applied forces in the N to mN regime, two properties have a strong influence on the microfriction: First, the chemical composition plays a dominant role and second, the film roughness. With silicon against DLC, microfriction of hydrogen-free DLC films was greater than the hydrogen containing films. With sapphire counterbodies, microfriction was inversely proportional to film roughness. For all films tested, microfriction was independent of the sliding velocity. Mild wear in the form of scratches was observed only on silicon, while no wear could be detected on any of the DLC films. These results illustrate the utility of implementing microtribological testing in a coating development for microsystems.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 741: Symposium J – Nano- and Microelectromechanical Systems (NEMS and MEMS) and Molecular Machines , 2002 , J13.2/Y7.2
Copyright
Copyright © Materials Research Society 2003

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