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Fracture Behavior of Micro-Sized Specimens Prepared From an Amorphous Alloy Thin Film at Ambient and Elevated Temperatures

Published online by Cambridge University Press:  21 March 2011

K. Takashima ,
R. Tarumi  and
Y. Higo
K. Takashima
Affiliation:
Precision and Intelligence Laboratory, Tokyo Institute of Technology, 4259 Nagatsuta, Midori-ku, Yokohama, 226-8503, Japan
R. Tarumi
Affiliation:
Precision and Intelligence Laboratory, Tokyo Institute of Technology, 4259 Nagatsuta, Midori-ku, Yokohama, 226-8503, Japan
Y. Higo
Affiliation:
Precision and Intelligence Laboratory, Tokyo Institute of Technology, 4259 Nagatsuta, Midori-ku, Yokohama, 226-8503, Japan
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Abstract

Fracture behavior of micro-sized cantilever beam type specimens prepared from an electroless deposited Ni-P amorphous alloy thin film has been investigated at ambient and elevated temperatures. Cantilever beam type specimens with dimensions of 10 x 12 x 50 μm3 were prepared from an electroless deposited Ni-P amorphous alloy thin film and notches were introduced by focused ion beam machining. Fatigue pre-cracks were introduced ahead of the notches. The introduction of fatigue pre-crack and fracture toughness tests were carried out using a mechanical testing machine for micro-sized specimens. The temperature of the specimen was controlled from room temperature to 473 K using a newly developed heating system. Compared with room temperature, fracture toughness increased approximately 40 % at 373 K but decreased 19 % at 473 K. The increase of fracture toughness at 373 K is considered to be related with the formation of nano-sized crystals and the decrease of fracture toughness at 473 K is considered to be due to the growth of crystals. It is required to consider the fracture behavior obtained in this investigation when designing actual MEMS devices using electroless deposited amorphous films.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 695: Symposium L – Thin Films: Stresses and Mechanical Properties IX , 2001 , L8.4.1
Copyright
Copyright © Materials Research Society 2002

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References

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