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Theoretical Calculation for the Young's Modulus of Poly-Si and a-Si Films

Published online by Cambridge University Press:  15 February 2011

Shuwen Guo ,
Daowen Zou  and
Weiyuan Wang
Shuwen Guo
Affiliation:
Physics Department, Jiangxi University, Nanchang 330047, China
Daowen Zou
Affiliation:
Physics Department, Jiangxi University, Nanchang 330047, China
Weiyuan Wang
Affiliation:
State Key Laboratories of Transducer Technology, Shanghai institute of Metallurgy, Academia Sinica, Shanghai 200050, China
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Abstract

A newly theoretical calculation for the Young's modulus Ey of poly-Si and a-Si thin films based on the combination of grain and grain boundary effects as well as the dependance of crystalline orientations is presented. The calculated results are in agreement with the experimental results in a wide range of grain size and hydrogen concentrations published in the literatures. The reason for aberration among experimental data of poly-Si and a-Si films caused by different hydrogen concentrations, texture and grain size has been discussed. The results offer a better understanding of. the effects of film structures on elastic properties of poly-Si and a-Si films.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 276: Symposia U/Y – Smart Materials Fabrication and Materials for Micro-Electro-Mechanical Systems , 1992 , 233
Copyright
Copyright © Materials Research Society 1992

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References

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