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A bending and expanding motion actuator

Published online by Cambridge University Press:  09 March 2009

Takayuki Tominaga ,
Kouji Senda ,
Nobuyuki Ohya ,
Takaharu Idogaki  and
Tadashi Hattori
Takayuki Tominaga
Affiliation:
Research Laboratories, Nippondenso Co., Ltd. 500-1 Minamiyama, Komenoki-cho, Nisshin-city, Aichi 470-01 (Japan)
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Summary

A bending and expanding motion actuator which iscomposed of multi-layered PZT unimorph cells has beendeveloped. These cells are piled one against another.Each cell's electrode is divided into three sectors and thefacing sectors are connected to one another. Multidirectionalbending is realized by controlling the drivingvoltage of each sector. The actuator is 12 mm indiameter, 20 mm in length and 6.4 g in weight with 40cells. The bending angle was 2.2 degrees, and the expansion displacement was 700 μm with 150 V. The resonant frequency was 95 Hz at 25 V.

Keywords

Motion BendingExpanding

Information

Type
Article
Information
Robotica , Volume 14 , Issue 5 , September 1996 , pp. 483 - 486
Copyright
Copyright © Cambridge University Press 1996

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References

1Hayashi, T., “Micromechanism”, J. Japan Soc. Precision Eng. 57, 23–27 (1991).Google Scholar
2Bart, S. F., Lober, T. A., Howe, R. T., Lang, J. H. and Schlecht, M. F., “Design Considerations for Microfabricated Electric Actuators” Sensors and Actuators 14, no. 3, 269–292 (1988).Google Scholar
3Abe, Takeshi and Reed, Miahael L., “RF-Magnetron Sputtering of Piezoelectric Lead-Zirconate-Titanate Actuator Films Using Composite Targets” MEMS '94, Osio, Japan, (1994) p. 164 et seq.Google Scholar
4Hase, T. and Shiosaki, T., “Preparation and Switching Kinetics of Pb(Zr, Ti)03 Thin Films Deposited by Reactive Sputtering” Jpn. J. Appl. Phys. 30, No. 9B, 2195–2162 (1991).Google Scholar
5Yamaguti, M., Kawamura, S., Minami, K. and Esashi, M., “Distributed Electrostatic Micro Actuator” MEMS '93, Fort Lauderdale, Florida (1993) p. 18 et seq.Google Scholar
6Bobbio, S. M., Kellam, M. D., Dudley, B. W., GoodwinJohansson, S., Jones, S. K., Jacobson, J. C., Trajan, F. M. and DuBois, T. D., “Integrated Force Arrays” MEMS '93, Fort Lauderdale, Florida (1993) p. 149 et seq.Google Scholar
7Suzumori, K. et al., “Flexible Microactuator for Miniature Robots” Proc. 4th IEEE Workshop on MEMS. 01. 30-Feb. 2, Nara, Japan (1991) pp. 204–209.Google Scholar
8Oiwa, Takaaki, Kaneko, Katsumi, Kaneko, Takeshi and Kyusojin, Akira, “High-Rigidity Multi-Degrees-of-Freedom Fine Motion Mechanism” J-JSPE 60, No. 9, 1355–1359 (1994).Google Scholar