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Dust particle charging process in a radio frequency sheath of plasma containing kappa distribution electrons

Published online by Cambridge University Press:  25 July 2022

Jing Ou*
Affiliation:
Institute of Plasma Physics, Chinese Academy of Sciences, Hefei 230031, PR China
J.M. Long
Affiliation:
Institute of Plasma Physics, Chinese Academy of Sciences, Hefei 230031, PR China University of Science and Technology of China, Hefei 230026, PR China
*
Email address for correspondence: ouj@ipp.ac.cn
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Abstract

Based on self-consistent modelling of the radio-frequency sheath parameters, such as the ion and electron densities and the ion velocity, the dust particle charging process in an RF sheath is investigated by employing the kappa $(\kappa )$ distribution for the electrons. It is shown that the charge number of the dust particle decreases near the sheath–wall interface while it shows the opposite tendency near the plasma-sheath edge, as the $\kappa$ value is decreased. The fluctuation of the dust particle charge modified by the $\kappa$ value depends on the dust particle radius. With an increases in the $\kappa$ value, the fluctuation of the dust particle charge has a slight increase for a small dust particle, and it shows a significant increase for a large dust particle. In addition, as the $\kappa$ value is decreased, the charge number of the dust particle obtained from the time-averaged plasma parameters deviates from the results obtained from the instantaneous plasma parameters. Moreover, a smaller deviation can be found for a large dust particle under the same $\kappa$ value conditions.

Information

Type
Research Article
Copyright
Copyright © The Author(s), 2022. Published by Cambridge University Press
Figure 0

Figure 1. The geometry of the RF sheath model.

Figure 1

Figure 2. The normalized sheath length (a), sheath potential (b), ratio density of electron to ion (c) and ion velocity (d) in two cycles for the different $\kappa$ values.

Figure 2

Figure 3. The normalized time-averaged sheath quantities as the function of the distance from the wall: the ion density (a), ion velocity (b), the electron density (c) and sheath potential (d) for the different $\kappa$ values.

Figure 3

Figure 4. The variation of the factor $\alpha$ with the $\kappa$ value.

Figure 4

Figure 5. The evolution of the dust particle charge as a function of time for the different $\kappa$ values with ${r_d} = 10\;\mathrm{\mu }\textrm{m}$ near the sheath–wall interface (a), and at the plasma-sheath edge (b).

Figure 5

Table 1. Quasi-stationary state values in figure 5.

Figure 6

Figure 6. The profile of the time-averaged dust particle charge in the quasi-stationary state as a function of distance from the wall for the different $\kappa$ values with ${r_d} = 10\;\mathrm{\mu }\textrm{m}$. At the plasma-sheath edge positions ${d_s}/{\lambda _{D,i}}$: $8.6(\kappa = 3)$, $7.3(\kappa = 5)$, $6.6(\kappa = 10)$.

Figure 7

Figure 7. The mean charge of the dust particle $\langle {Q_d}\rangle$ (a), and fluctuation of the dust particle charge $\varDelta \textrm{Z}_d^{\textrm{amp}}$ (b) near the sheath–wall interface in the quasi-stationary state as the functions of the $\kappa$ value and ${r_d}$.

Figure 8

Figure 8. The evolution of the dust particle potential as a function of time for $\kappa = 3,\;{r_d} = 5\;\mathrm{\mu }\textrm{m}$ (a), $\kappa = 3,\;{r_d} = 50\;\mathrm{\mu }\textrm{m}$ (b), $\kappa = 10,\;{r_d} = 5\;\mathrm{\mu }\textrm{m}$ (c) and $\kappa = 10,\;{r_d} = 50\;\mathrm{\mu }\textrm{m}$.

Figure 9

Table 2. Quasi-stationary state values in figure 8.

Figure 10

Figure 9. The evolution of the dust particle charge as a function of time for different $\kappa$ values with ${r_d} = 5\;\mathrm{\mu }\textrm{m}$ (a) and ${r_d} = 10\;\mathrm{\mu }\textrm{m}$ (b). The dashed line denotes ${\bar{Q}_d}$ obtained from the time-averaged plasma parameters in the sheath.

Figure 11

Table 3. Quasi-stationary state values in figure 9.