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EM simulation assisted parameter extraction for transferred-substrate InP HBT modeling

Published online by Cambridge University Press:  07 May 2018

Tom K. Johansen*
Affiliation:
Department of Electrical Engineering, Electromagnetic Systems Group, DK-2800 Kgs. Lyngby, Denmark
Ralf Doerner
Affiliation:
Ferdinand-Braun-Institut (FBH), Leibniz-Institut für Höchstfrequenztechnik, D-12489 Berlin, Germany
Nils Weimann
Affiliation:
Ferdinand-Braun-Institut (FBH), Leibniz-Institut für Höchstfrequenztechnik, D-12489 Berlin, Germany
Maruf Hossain
Affiliation:
Ferdinand-Braun-Institut (FBH), Leibniz-Institut für Höchstfrequenztechnik, D-12489 Berlin, Germany
Viktor Krozer
Affiliation:
Ferdinand-Braun-Institut (FBH), Leibniz-Institut für Höchstfrequenztechnik, D-12489 Berlin, Germany
Wolfgang Heinrich
Affiliation:
Ferdinand-Braun-Institut (FBH), Leibniz-Institut für Höchstfrequenztechnik, D-12489 Berlin, Germany
*
Author for correspondence: Tom K. Johansen, E-mail: tkj@elektro.dtu.dk
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Abstract

In this paper, an electromagnetic (EM) simulation assisted parameter extraction procedure is demonstrated for accurate modeling of down-scaled transferred-substrate InP HBTs. The external parasitic network associated with via transitions and device electrodes is carefully extracted from calibrated three-dimensional EM simulations up to 325 GHz. Following an on-wafer multi-line Through-Reflect-Line calibration procedure, the external parasitic network is de-embedded from the transistor measurements and the active device parameters are extracted in a reliable way. The small-signal model structure augmented with the distributed parasitic network provides accurate small-signal prediction up to 220 GHz.

Information

Type
Research Papers
Copyright
Copyright © Cambridge University Press and the European Microwave Association 2018 
Figure 0

Fig. 1. Vertical cross-section of transferred-substrate InP HBT TMIC technology (all measures are given in μm).

Figure 1

Fig. 2. Microphotograph of on-wafer test structure for 0.5 × 6 μm2 InP HBT showing reference planes for model extraction.

Figure 2

Fig. 3. Detailed cross-section of InP HBT in microstrip test frame. The shaded areas represent the active transistor layers.

Figure 3

Fig. 4. Active device embedded in detailed parasitic model structure.

Figure 4

Fig. 5. Extracted (solid lines) and modeled (dashed lines) for (a) parasitic capacitances for full open, (b) parasitic inductances for full short, and (c) parasitic resistances versus frequency for full short.

Figure 5

Fig. 6. Active device embedded in parasitic model structure.

Figure 6

Table 1. Parasitic model parameters (elements in parenthesis are extracted from cut-off mode measurements)

Figure 7

Fig. 7. Equivalent circuit model for active part of InP HBT.

Figure 8

Fig. 8. Extraction with (solid line with crosses) and without (solid line with pluses) parasitic network de-embedding for base-collector capacitance versus collector current. The dashed line is a plot of (12) using parameters Cbc0 = 5.1 fF, k1 = 0.48 ps/V, and Itc = 13.8 mA. The collector-emitter bias voltage is Vce = 1.8 V.

Figure 9

Fig. 9. Extraction with (solid line with crosses) and without (solid line with pluses) parasitic network de-embedding for effective base resistance versus 1 − (1 − X0)Ic/Ip. The dashed line is a plot of (14) using parameters X0 = 0.32, Ip = 6.8 mA, Rbx = 5.8 Ω and Rbi = 40.0 Ω. The collector-emitter bias voltage is Vce = 1.8 V.

Figure 10

Fig. 10. Real part of distributed base impedance versus frequency. The dashed line indicates the asymptotic value using Rbi ≈ 42 Ω. The bias point is Vce = 1.8 V, Ic = 8 mA.

Figure 11

Table 2. Extracted equivalent-circuit elements (Vce = 1.8 V, Ic = 8 mA)

Figure 12

Fig. 11. Comparison of measured (solid lines with symbols) and modeled (dots) S-parameters in the frequency range from 50 MHz to 110 GHz and 140  to 220 GHz. The bias points are Vce = 1.8 V, Ic = 2.9 mA, and Vce = 1.8 V, Ic = 8.0 mA.

Figure 13

Fig. 12. Comparison of measured (solid lines) and modeled (dots) magnitude of short-circuited current gain, |H21|, versus frequency in the frequency range from 50 MHz to 110 GHz and 140 to 220 GHz. The bias point is Vce = 1.8 V, Ic = 8 mA.

Figure 14

Fig. 13. Comparison of measured (solid lines) and modeled (dots) Mason's gain, U, versus frequency in the frequency range from 50 MHz to 110 GHz and 140 to 220 GHz. The bias point is Vce = 1.8 V, Ic = 8 mA.

Figure 15

Fig. 14. Comparison of measured (solid lines) and modeled (dots) maximum stable gain/maximum available gain, Gmsg/Gmag, versus frequency in the frequency range from 50 MHz to 110 GHz and 140 to 220 GHz. The bias point is Vce = 1.8 V, Ic = 8 mA.