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Large gyro-orbit model of ion velocity distribution in plasma near a wall in a grazing-angle magnetic field

Published online by Cambridge University Press:  15 February 2021

Alessandro Geraldini*
Affiliation:
Institute for Research in Electronics and Applied Physics, University of Maryland, College Park, MD 20742, USA
*
Email address for correspondence: ale.gerald@gmail.com
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Abstract

A model is presented for the ion distribution function in a plasma at a solid target with a magnetic field $\boldsymbol {B}$ inclined at a small angle, $\alpha \ll 1$ (in radians), to the target. Adiabatic electrons are assumed, requiring $\alpha \gg \sqrt {Zm_{e}/m_{i}}$, where $m_{e}$ and $m_{i}$ are the electron and ion mass, respectively, and $Z$ is the charge state of the ion. An electric field $\boldsymbol {E}$ is present to repel electrons, and so the characteristic size of the electrostatic potential $\phi$ is set by the electron temperature $T_{e}$, $e\phi \sim T_{e}$, where $e$ is the proton charge. An asymptotic scale separation between the Debye length $\lambda _{D} = \sqrt {\epsilon _0 T_{{e}} / e^{2} n_{{e}} }$, the ion sound gyro-radius $\rho _{s} = \sqrt { m_{i} ( ZT_{e} + T_{i} ) } / (ZeB)$ and the size of the collisional region $d_{c} = \alpha \lambda _{\textrm {mfp}}$ is assumed, $\lambda _{D} \ll \rho _{s} \ll d_{c}$. Here $\epsilon _0$ is the permittivity of free space, $n_{e}$ is the electron density, $T_{i}$ is the ion temperature, $B= |\boldsymbol {B}|$ and $\lambda _{\textrm {mfp}}$ is the collisional mean free path of an ion. The form of the ion distribution function is assumed at distances $x$ from the wall such that $\rho _{s} \ll x \ll d_{c}$, that is, collisions are not treated. A self-consistent solution of the electrostatic potential for $x \sim \rho _{s}$ is required to solve for the quasi-periodic ion trajectories and for the ion distribution function at the target. The large gyro-orbit model presented here allows to bypass the numerical solution of $\phi (x)$ and results in an analytical expression for the ion distribution function at the target. It assumes that $\tau =T_{i}/(ZT_{e})\gg 1$, and ignores the electric force on the quasi-periodic ion trajectory until close to the target. For $\tau \gtrsim 1$, the model provides an extremely fast approximation to energy–angle distributions of ions at the target. These can be used to make sputtering predictions.

Information

Type
Research Article
Copyright
Copyright © The Author(s), 2021. Published by Cambridge University Press
Figure 0

Figure 1. Ion gyro-orbits, whose gyro-radius is $\rho _{i}$, reaching the target when the angle between the magnetic field $\boldsymbol {B}$ and the target is small, $\alpha \ll 1$. The axes $(x,y,z)$ are labelled. (a) With no normal electric field, the circular orbit moves closer to the target by $\alpha \rho _{i}$ after a gyro-period and thus the normal velocity of an ion at the target is $v_x \sim \sqrt {\alpha } v_{t,i}$. (b,c) With the magnetic presheath and Debye sheath electric field $\boldsymbol {E}$, ions are accelerated to $v_x \sim \sqrt {\alpha v_{t,i}^{2} + v_{B}^{2} }$.

Figure 1

Figure 2. An electron gyro-orbit, whose gyro-radius is $\rho _{e}$, streaming towards the wall along the magnetic field $\boldsymbol {B}$ with velocity $w_{\parallel }$.

Figure 2

Figure 3. (a,c) Wall-normal velocity distributions at the Debye sheath entrance from the numerical solution of $\phi (x)$ in the magnetic presheath (solid lines) and from the large gyro-orbit model (dashed lines), for $\tau = 1$ (a) and $\tau = 5$ (c) for angles $\alpha = 1^{\circ }, 3^{\circ }, 5^{\circ }$. (b,d). The variance $\langle \tilde {v}_x^{2} \rangle$ of the distributions from the numerical solution of $\phi (x)$ (circles) and from the model (crosses) for values of $\alpha$ between $0.5^{\circ }$ and $5^{\circ }$ for $\tau = 1$ (b) and $\tau = 5$ (d). The dotted lines are drawn to guide the eye, showing the linear scaling $\langle \tilde {v}_x^{2} \rangle / v_{t,i}^{2} \sim \alpha$ for $\alpha \gtrsim 1^{\circ }$. (Note: here $\alpha$ is measured in degrees.).

Figure 3

Figure 4. The velocity of slow ions, $V_{x, \textrm {slow}} (\bar {x})$, is shown as a function of the adiabatic invariant $\mu _{\textrm {op}} (\bar {x})$ with ($\tau , \alpha$) labelled. Solid lines are obtained from the numerical solution of $\phi (x)$; dashed lines are obtained from the large gyro-orbit model.

Figure 4

Figure 5. The quantity $2 \bar {\varDelta }_{M} / (\varOmega ^{2} \bar {x}^{2} + v_{t,i}^{2} )$, with $\bar {\varDelta }_{M} (\bar {x}) = 2{\rm \pi} \alpha \mu _{\textrm {op}}' (\bar {x} ) v_{t,i}$, is shown as a function of the adiabatic invariant $\mu _{\textrm {op}} (\bar {x})$ for labelled values of ($\tau , \alpha$). Solid lines are obtained from the numerical solution of $\phi (x)$; dashed lines are obtained from the large gyro-orbit model. For $2 \bar {\varDelta }_{M} / (\varOmega ^{2} \bar {x}^{2} + v_{t,i}^{2} ) \ll 1$ the asymptotic theory in $\alpha \ll 1$ is valid.

Figure 5

Figure 6. Energy–angle distributions at the target, $\zeta _{W} ( E, \theta )$, obtained from the full electrostatic potential solution (full theory) and from the large gyro-orbit model for $\tau = 0.5$ and $\alpha = 3^{\circ }$ and $5^{\circ }$, are shown normalized to their peak value.

Figure 6

Figure 7. Energy–angle distributions at the target, $\zeta _{W} ( E, \theta )$, obtained from the full electrostatic potential solution (full theory) and from the large gyro-orbit model for $\tau = 2$ and $\alpha = 3^{\circ }$ and $5^{\circ }$, are shown normalized to their peak value.