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Laser-induced droplet deformation: curvature inversion explained from instantaneous pressure impulse

Published online by Cambridge University Press:  01 October 2025

Hugo Leonardo França*
Affiliation:
Van der Waals-Zeeman Institute, Institute of Physics, University of Amsterdam, Science Park 904, Amsterdam 1098XH, The Netherlands Advanced Research Center for Nanolithography, Science Park 106, 1098XG, Amsterdam, The Netherlands
Hermann Karl Schubert
Affiliation:
Van der Waals-Zeeman Institute, Institute of Physics, University of Amsterdam, Science Park 904, Amsterdam 1098XH, The Netherlands Department of Physics and Astronomy and LaserLaB, Vrije Universiteit Amsterdam, De Boelelaan 1100, 1081 HV, Amsterdam, The Netherlands
Oscar Versolato
Affiliation:
Van der Waals-Zeeman Institute, Institute of Physics, University of Amsterdam, Science Park 904, Amsterdam 1098XH, The Netherlands Department of Physics and Astronomy and LaserLaB, Vrije Universiteit Amsterdam, De Boelelaan 1100, 1081 HV, Amsterdam, The Netherlands
Maziyar Jalaal
Affiliation:
Van der Waals-Zeeman Institute, Institute of Physics, University of Amsterdam, Science Park 904, Amsterdam 1098XH, The Netherlands
*
Corresponding author: Hugo Leonardo França, franca.hugo1@gmail.com

Abstract

We investigate the shape of a tin sheet formed from a droplet struck by a nanosecond laser pulse. Specifically, we examine the dynamics of the process as a function of laser beam properties, focusing on the outstanding puzzle of curvature inversion: tin sheets produced in experiments and state-of-the-art extreme ultraviolet (EUV) nanolithography light sources curve in a direction opposite to previous theoretical predictions. We resolve this discrepancy by combining direct numerical simulations with experimental data, demonstrating that curvature inversion can be explained by an instantaneous pressure impulse with low kurtosis. Specifically, we parametrise a dimensionless pressure width, $ W$, using a raised cosine function and successfully reproduce the experimentally observed curvature over a wide range of laser-to-droplet diameter ratios, $ 0.3 \lt d/D_0 \lt 0.8$. The simulation process described in this work has applications in the EUV nanolithography industry, where a laser pulse deforms a droplet into a sheet, which is subsequently ionised by a second pulse to produce EUV-emitting plasma.

Information

Type
JFM Papers
Creative Commons
Creative Common License - CCCreative Common License - BY
This is an Open Access article, distributed under the terms of the Creative Commons Attribution licence (https://creativecommons.org/licenses/by/4.0/), which permits unrestricted re-use, distribution and reproduction, provided the original article is properly cited.
Copyright
© The Author(s), 2025. Published by Cambridge University Press
Figure 0

Figure 1. Initialisation strategy to obtain a velocity field from a pressure profile given on the droplet surface. (a) Sketch of the droplet and laser. (b) Examples of possible initial pressure profile functions on the droplet surface. (c) Radial and axial velocity components on three sheets obtained from different pressure profile types. The values of $u_z$ represent the droplet velocity relative to its centre-of-mass translational velocity.

Figure 1

Table 1. Different initial pressure profiles used throughout this work. In the cosine and raised cosine expressions, $H$ represents the standard Heaviside step function.

Figure 2

Figure 2. Laser pulse schemes with specific irradiation geometries lead to either (a) positive or (b) negative curvature, visualised by shadowgraphs.

Figure 3

Figure 3. Initial droplet radial velocity $\bar {u}_{r_{\textit{def}}}(r, \theta )$ in spherical coordinates at time $t = 0$ for different profiles and profile parameters. (ab) Velocity at the droplet surface over $\theta$ for three Gaussian and three raised cosine profiles, respectively. The insets show the normalised pressure profiles over the droplet surface. (c) Value of $\theta _{\textit{max}}$ as a function of profile parameter. Panels (di) show the $\bar {u}_{r_{\textit{def}}}$ field within the droplet for the six cases shown in panels (a) and (b). The arrows represent the magnitude and sign of $\bar {u}_{r_{\textit{def}}}(1, \theta )$ and the dashed line indicates the point of maximum $\bar {u}_{r_{\textit{def}}}$ for each $r$.

Figure 4

Figure 4. Method used to define and extract the sheet curvature of experiments and simulations based on fitted circles. The black lines represent the sheet interface, as extracted from a simulation or an experiment. The orange and red lines show the circles that were fitted to the laser side and back side of the sheet, respectively.

Figure 5

Figure 5. Sheet curvature over time for different values of the raised cosine parameter $W$. (a) Average curvature $\kappa _{\textit{avg}}$, (b) $\kappa _1$ and (c) $\kappa _2$. The inset shows the peak average curvature $\kappa ^{\textit{max}}_{\textit{avg}}$ for each simulation as a function of $W$. The transparent bands show the uncertainty in the curvature measurement for simulations as defined in Appendix D. (d,e) Droplet/sheet interface at selected time stamps for two simulations with $W = 1.25$ and $W = 2.75$, respectively. The components of the velocity field in cylindrical coordinates $u_x$ and $u_z$ are also shown in the snapshots. The exact parameters for these simulations are presented in table 2 of Appendix A.

Figure 6

Figure 6. Simulated average curvature and $\theta _{\textit{max}}$ for different raised cosine parameters $W$. The curvature is always obtained at time $t \boldsymbol{\cdot }\dot {R}_0/R_0 = 1$. Panel (a) shows $\theta _{\textit{max}}$ and $\kappa _{\textit{avg}}$ over $W$. (b) Correlation between $\theta _{\textit{max}}$ and $\kappa _{\textit{avg}}$. (c) Snapshots for data points shown in panels (a) and (b). The coloured lines represent the two circle fits in figure 4. Error bars estimate the uncertainty from fitting circles using different sections of the sheet; see Appendix D for details. The exact parameters for these simulations are presented in table 2 of Appendix A.

Figure 7

Figure 7. Experimentally measured sheet curvature for different ratios $d/D_0$. For all cases shown, we use $E_{pp}=0.8$ mJ, $d=20\,\unicode{x03BC}$m and $\tau _p=10$ ns, while $D_0$ is varied from $59$ to $27\,\unicode{x03BC}$m. (a) the experimental curvature is plotted as a function of $d/D_0$. Grey markers are the individual repetitions of the experiment and black markers/bars show their mean. Error bars estimate the uncertainty from using circle fits; see Appendix D for details. As a qualitative comparison, the numerical curvature is shown as a function of the raised cosine parameter $W$ (red). (b) a shadowgraph for each $d/D_0$ is shown, going from $59$ (top left) to $27\,\unicode{x03BC}$m (bottom right). The orange and red curves indicate the circles that were fitted to each side of the sheet, as described in figure 4. The bright spots are generated by plasma light that overexposes the camera chip. In some frames, this plasma is offset relative to the droplet centre as a result of vertical motion of the droplet over time. Our images are flipped vertically, so the droplet is displaced upward in relation to the plasma location. The exact parameters for these simulations and experiments are presented, respectively, in tables 2 and 3 of Appendix A.

Figure 8

Figure 8. Frame-by-frame comparison between sheets obtained experimentally and numerically for three different sets of parameters. The background of each plot shows the experimental side-view shadowgraph, while the red/green/yellow outlines show the simulated sheet cross-section. The insets show the side-view projection of the simulated sheet. (a) Numerical and experimental curvature over time for each case in the following panels. Circles and error bars represent the experimental results, and dashed lines represent the numerical results. The transparent bands show the uncertainty in the curvature measurement for simulations as defined in Appendix D. The uncertainty for experimental points is defined in the same manner. (b) Case from a focused laser beam resulting in negative curvature. (c) Unfocused beam resulting in positive curvature. (d) Experiment with a large water droplet reproduced from Klein et al. (2015). The exact parameters for these simulations and experiments are presented in table 4 of Appendix A.

Figure 9

Table 2. Non-dimensional groups for all simulations shown in figures 5, 6 and 7. We note that the propulsion-based numbers $\textit{We}$ and $\textit{Re}$ are the actual inputs provided to our solver, while $\textit{We}_{\textit{def}}$ and $\textit{We}_{\textit{def}}$ are measured during post-process since they are the actual relevant numbers to study droplet expansion.

Figure 10

Table 3. Non-dimensional groups for the experiments shown in figure 7. For a fixed laser beam energy and size, the droplet size is varied as a parameter in our experimental set-up. The Reynolds and Weber numbers (both for propulsion and expansion) are measured as an output.

Figure 11

Table 4. Non-dimensional groups for the simulations and experiments shown in figure 8.

Figure 12

Figure 9. Effect of the Reynolds number in the sheet curvature at time $t \boldsymbol{\cdot }\dot {R_0}/R_0 = 1$. The values $\textit{We} = 1000$, $\mu _a/\mu _d = 10^{-4}$, $\rho _a/\rho _d = 10^{-4}$ are kept fixed, and a sweep is performed in the Reynolds number and pressure profile parameter $W$. Minimal viscous effects are observed for $\textit{Re}=1000$ and $\textit{Re}=100$, with significant dissipation being present only for $\textit{Re} = 10$.

Figure 13

Figure 10. Effect of the Weber number in the sheet curvature at time $t \boldsymbol{\cdot }\dot {R_0}/R_0 = 1$. The values $\textit{Re} = 1000$, $\mu _a/\mu _d = 10^{-4}$, $\rho _a/\rho _d = 10^{-4}$ are kept fixed, and a sweep is performed in the Weber number and pressure profile parameter $W$. Almost no capillary effects are observed for $\textit{We}=1000$. For $\textit{We}=100$ and, particularly, $\textit{We}=10$, strong capillary-driven droplet retraction and oscillations are present for the high values of $W$.

Figure 14

Figure 11. Effect of the viscosity ratio in the sheet curvature at time $t = R_0/\dot {R_0}$. The values $\textit{Re} = 1000$, $\textit{We} = 1000$, $\rho _a/\rho _d = 10^{-4}$ are kept fixed, and a sweep is performed in the viscosity ratio and pressure profile parameter $W$. Due to the very small density and high Reynolds number, no effects are observed here even though the viscosity ratio is within four orders of magnitude.

Figure 15

Figure 12. Effect of the density ratio in the sheet curvature at time $t = R_0/\dot {R_0}$. The values $\textit{Re} = 1000$, $\textit{We} = 1000$, $\mu _a/\mu _d = 10^{-4}$ are kept fixed, and a sweep is performed in the density ratio and pressure profile parameter $W$. Almost no effects are observed for the two smaller values of density ratio. For the higher values, significant drag is present, particularly for the cases with small $W$, resulting in changes in the measured curvature and reducing expansion velocity.

Figure 16

Figure 13. Effect of the density ratio in the sheet curvature at time $t = R_0/\dot {R_0}$. This case differs from figure 12 as the propulsion velocity is not removed at the initial condition, so drag will also be observed due to the $z$-direction velocity. The values $\textit{Re} = 1000$, $\textit{We} = 1000$, $\mu _a/\mu _d = 10^{-4}$ are kept fixed, and a sweep is performed in the density ratio and pressure profile parameter $W$. Almost no effects are observed for the two smaller values of density ratio. For the higher values, significant drag is present, particularly for the cases with small $W$, resulting in changes in the measured curvature and reducing expansion velocity. For the highest density ratio, the horizontal drag is strong enough that the sheet always displays a negative curvature, regardless of chosen $W$.

Figure 17

Figure 14. Radius and thickness of the droplet/sheet over time for four different simulations. All simulations are performed with Gaussian pressure profiles, and the Gaussian width is varied in the set $\sigma \in \{ \pi /8, \ \pi /6, \ \pi /4, \ \pi /3 \}$. Results from this work (solid lines) are compared against the results from the boundary integral simulations by Gelderblom et al. (2016) (circles) for numerical validation of our implementation.

Figure 18

Figure 15. Measurements of the velocity ratio $\dot {R}_0 / U_z$ for raised cosine profiles. (a) Velocity ratio as a function of $W$ for the initialisation approach in this work and as predicted with the code RALEF by Hernandez-Rueda et al. (2022). (b) Numerical average curvature $\kappa _{\textit{avg}}$ as a function of the velocity ratio in our simulations.

Supplementary material: File

França et al. supplementary movie

Droplet deformation and sheet curvature over time for different values of the raised cosine parameter $W$.
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