Well-crystallized polycrystalline thin films of cubic barium titanate (BaTiO3) have been synthesized on Ti-covered Si substrates by exposing the substrates to a Ba(OH)2 aqueous solution at 160 °C and a low pressure less than 1 MPa. It was presumed that the film formation of BaTiO3 involved a dissolution-crystallization mechanism, which provides an attractive approach to produce other titanate films and powders. Also, we have used for the first time this hydrothermal technique to deposit epitaxial (001)-textured PbTiO3 thin films on SrTiO3(100) substrates.