Thin amorphous and polycrystalline tungsten oxide films have been prepared by Chemical Vapor Deposition (CVD) from metallorganic precursor − tungsten hexacarbonyl − at atmospheric pressure. The dependence of the composition and the structure of tungsten oxide films on the technological conditions has been investigated by XPS, XRD, DTA-TGA and Raman spectroscopy. As a result it has been established that: at high values of the flow-rates of the reaction gases amorphous films of very low density have been obtained; in the XPS spectra of the understoichiometric WO3−y (0 < y < 0.3) films besides W6+, also W5+ and W4+ stateshave been observed. First to observe in the Raman spectra of amorphous CVD-WO3 films is the band at ~ 950 cm−1,characteristic for terminalW6+ = O bonds in result of the presence of structural water. Theexistence of structural water in the amorphous material has been established by thermal analyze, also.

In this work the properties of polycrystalline silicon layers obtained by rapid thermal annealing have been discussed. Amorphous silicon layers with thickness of 3000 Å have been deposited on silicon wafers in rf sputtering system. The layers were annealed for 15 s to 5 min at temperatures in the range 800–1200 °C in vacuum 5 × 10−5 Torr. A correlation was established between structure, morphology, sheet resistance, and the parameters of the RTA annealing.

Wsi2 films were prepared by rapid thermal annealing (RTA) in the temperature range of 800 -1400 °C for time durations of 15 sec -3 minutes. In some of the treatment experiments different gases were involved and a conclusion is made about the role of hydrogen favoring Wsi crystal phase growing at 800 °C. W films with thichnesses in the range 200 Å - 1000 Å were deposited on monocrystalline Si by pyrolitical decomposition of W(CO)6 in CVD reactor at atmospheric pressure and argon atmosphere. Reflection High Energy Electron Diffraction (RHEED) and Scanning Electron Microscopy (SEM) technics were used for structural characterization and FPP-100 device for resistance measurements. Results show that by solid state reaction applied at different RTA processes WSi2 phase could be formed.Resistivities as low as 2-3 mΩ.cm are obtained for 800 -1000 °C.

One of the most important problems to solve in order to improve the CdTe solar cell performance is the deposition of stable ohmic contacts. W and Mo with their high work function, high temperature stability and good mechanical properties are prospective materials for contacts to p-CdTe. This paper presents data for the electrophysical characteristics of W or Mo/CdTe and W or Mo/ CdS-CdTe heterostructure systems. W and Mo films are deposited by a W(CO)6 based CVD process at atmospheric pressure and low temperatures (250–300)°C. We emphasize the improvment of the contact properties by developing a transitional layer heavily doped with acceptors. The defects arrangement in the layer should promote the diffusion of such impurities as Cu, P, As etc. A proper balance between the impurities and the defects could be achieved by suitable thermal treatment. Rapid thermal or traditional annealing in different gas atmospheres – N2, Ar or air were applied, followed by chemical or electrochemical treatment. Electrical characteristics measurements and structural studies were performed for CdTe layers as well as for the SnO2 - CdS - CdTe structures