High-order harmonic generation (HHG) in noble gases driven by femtosecond lasers is currently a feasible solution to obtain ultrafast pulses in the extreme ultraviolet (EUV) wavelength range. Implementation of high-flux EUV sources requires driving HHG using an ultrafast laser source in the visible wavelength range with MHz repetition rate. In this paper, we employ a multi-pass cell followed by chirped mirrors to compress 1-MHz, 200-W, 300-fs pulses at 1.03 μm to a duration of 35 fs. The resulting 186-W compressed pulses are focused onto 0.5-mm thick beta barium borate crystal to drive second-harmonic generation and produce positively chirped pulses at 520 nm. These green pulses are de-chirped to 26 fs in duration with an average power of 64 W, which, to the best of our knowledge, represents the highest average power of green pulses with a duration below 100 fs.
