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Growth, structure, and mechanical properties of transition metal carbide superlattices

Published online by Cambridge University Press:  31 January 2011

H. Högberg ,
J. Birch ,
M. Odén ,
J-O. Malm ,
L. Hultman  and
U. Jansson
H. Högberg
Affiliation:
Department of Inorganic Chemistry, The Ångström Laboratory, Uppsala University, P.O. Box 538, SE-75121 Uppsala, Sweden
J. Birch
Affiliation:
Department of Physics, Thin Film Physics Division, Linköping University, SE-58183 Linköping, Sweden
M. Odén
Affiliation:
Department of Mechanical Engineering, Division of Engineering Materials, Linköping University, SE-58183 Linköping, Sweden
J-O. Malm
Affiliation:
National Center of HREM, Department of Inorganic Chemistry 2, Lund University, P.O. Box 124, SE-22100 Lund, Sweden
L. Hultman
Affiliation:
Department of Physics, Thin Film Physics Division, Linköping University, SE-58183 Linköping, Sweden
U. Jansson
Affiliation:
Department of Inorganic Chemistry, The Ångström Laboratory, Uppsala University, P.O. Box 538, SE-75121 Uppsala, Sweden
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Abstract

Superlattices of TiC/VC have been deposited on MgO(001) substrates by simultaneous direct current metal magnetron sputtering and C60 evaporation in the temperature range 200–800 °C. Thin superlattices (approximately 1000 Å) deposited at 400 °C exhibited an epitaxial growth with abrupt interfaces while films deposited at 200 °C showed a partial loss of epitaxy. At 800 °C roughening by surface diffusion started to degrade the superlattices and introduced a columnar microstructure. A loss of epitaxy was observed for thicker (>7000 Å) superlattice films deposited at 400 °C. The results suggest that this observation is due to difficulties in depositing epitaxial VC.

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Type
Articles
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Journal of Materials Research , Volume 16 , Issue 5 , May 2001 , pp. 1301 - 1310
Copyright
Copyright © Materials Research Society 2001

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References

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