Published online by Cambridge University Press: aN Invalid Date NaN
This chapter explores the electrostatic discharge (ESD) challenges arising from emerging heterogeneous packaging technologies, including 2.5D and 3D integration schemes. It highlights the increasing density and complexity of die-to-die interfaces, hybrid bonding, and microbump-based interconnects, emphasizing their vulnerability to ESD during both manufacturing and operation. The reduced size and capacitance of these interfaces necessitate lower charge device model (CDM) target levels, prompting revised protection strategies and verification methodologies. Techniques such as dual-diode protection, the use of interposer-integrated passive and active ESD elements, and the application of polymer nanocomposites are discussed for robust ESD mitigation. The chapter also examines ESD risks during assembly processes like chip-on-wafer and wafer-on-wafer bonding, recommending specific design and equipment modifications for charge control. Ultimately, the content provides a holistic view of adapting ESD protection in advanced packaging systems to ensure device reliability and performance.
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